DCG3 Digital DC Sputtering Power Supply

Product Code: DCG3 Digital DC Sputtering Power Supply

Weight: 58.00kg

Dimensions: 644.00cm x 480.00cm x 178.00cm

Features:

1: It adopts advanced ARM+DSP digital control technology

2: It has high power density

3: It has high output precision and good process repeatability

4: It is equipped with an intelligent arc management system, which improves the arc suppression and restart speed

5: Constant current/constant power mode switching, constant power mode can better ensure the repeatability of the coating process

6: There are two optional ways of air cooling and water cooling, it can be applied to different environments

7: Its operation can be controlled by panel, remote PLC control analog PROFIBUS communication

Model	ZY/DC(G3)-3000	GENCOA Speedflo	Support
Input voltage	380-400Vac + PE	PLC control mode	local/remote (analog, RS485、DP）
Input frequency	50-60HZ	analog interface	DB-25PIN 0-10V DC
Power	10-80kw	RS485 interface	DB-9 Modbus Pin 1A 2B 5GND
Work mode	Constant power P/constant current I	DPinterface	DB-9 ProfiBus Pin 3A 8B 5GND（Optional）
Output current Max	0-200A	Size[mm]	4U 19inches 178HX480WX644D
Output voltage Max	0-1000V	Cooling way	Water cooling + auxiliary air cooling, the wind direction is front in and back out
Arc energy Arc	<0.3mJ/kW	Cooling water pipe size	φ16mm（OD）×φ12mm（ID）
Output precision	<±0.5%, Set value comparison	Inlet water pressure	0.15 to 0.3 Mpa
Efficiency	Rated output>90%	Inlet water temperature	+25 to +35 ℃
Weight	48-98Kg	Influent flow	l/min >10

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