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简体中文 30KW 40KHz Mid Frequency Vacuum Deposition Sputtering Plasma Power Supply
Product Code:
Mid frequency power source
30KW 40KHz Mid Frequency Vacuum Deposition Sputtering Plasma Power Supply
| Items | Parameter |
| Input voltage & frequency: | 380 -400Vac 3P +PE 50 -60HZ |
| Output power: | 30KW |
| Output current Max: | 75A |
| Output voltage Max: | 600V |
| Operating mode: | Constant power KW/constant current I |
| Output waveform: | Square wave |
| Operating frequency: | 40KHZ / ±0.01% |
| Pulse off time: | 5-1000 ms |
| Pulse on time: | 1-100 ms |
| Pulse mode: | 0.1ms step |
| Output channel: | Single Channel |
| Load matching: | Ultra-wide load matching capability without switching gears (5-10 Ω) |
| Size mm total | 4 U 19 177 H X 482 W 644 D 48 Kg |
| Communication interface: | Modbus, compatible with German TrumRF power supply, seamless switching |