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RF Radio Frequency Power Source

RF Radio Frequency Power Source

This unit is specially used for the tubular PECVD film formation of photovoltaic cells. It can deposit about 100 nanometers on the surface of the silicon wafer with a conversion efficiency of >23% dark blue silicon nitride film.


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Photovoltaic PECVD RF power supply (dual output)

This unit is specially used for the tubular PECVD film formation of photovoltaic cells. It can deposit a dark blue silicon nitride film with a conversion efficiency of about 100 nanometers > 23% on the surface of the silicon wafer.

Photovoltaic PECVD RF Frequency Power Supply (Single Output)

This unit is specially used for the tubular PECVD film formation of photovoltaic cells. It can deposit about 100 nanometers on the surface of the silicon wafer with a conversion efficiency of >23% dark blue silicon nitride film.