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Bipolar Pulse Bias Power Supply

Product Code: Bipolar Pulse Bias Power Supply ZY/BIAS(G3) Series
Weight: 60.00kg
Dimensions: 644.00cm x 480.00cm x 178.00cm

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1: Its main loop topology adopts PFC+full-bridge architecture combined with ARM+DSP digital control technology

3: It has built-in arc extinguishing time setting of 10μs-100μs to adapt to different processes and products, and displays Arc count

4: It can detect V-ARC & I-ARC at the same time, quickly cut off the output and start the built-in patented technology to eliminate residual arc energy, avoid substrate discharge arcing, and ensure high-precision film layer to improve the yield of plated parts. Surface finish and film bonding force

5: It can reasonably adjust the duty cycle (10-90%), can improve and control the film forming speed and temperature, increase the film layer and improve the deposition rate6: Its output voltage is 0-1000V without shifting, glow cleaning and coating deposition

Items

ZY/BIAS(G3)-4020

Arc energy

（ARC)

<0.5mJ/kW

Input voltage

380-400Vac + PE

PLC control mode

Local/remote (analog、RS485、RS232）

Input frequency

50-60HZ

Analog interface

DB-25PIN    0-10V DC

Power

18KW

RS485Communication Interface

DB-9   Modbus Pin 1A  2B 5GND

Work Mode

Constant voltage (V)

DP Communication Interface

DB-9   ProfiBus Pin 3A  8B 5GND（Optional）

Output current Max:

500V/30A

Efficiency

>90%, Rated output is the premise

Output voltage Max:

0-1000V/15A

Size[mm]

4U 19inches  178HX480WX644D 

Output frequency:

   40-80KHZ

Cooling way

Water cooling + auxiliary air cooling, front in and back out

Duty Cycle

10-90%

Cooling water pipe size

φ16mm（OD）×φ12mm（ID）

Reverse voltage

0-50V adjustable

Inlet pressure

0.15 to 0.3 Mpa

Reverse pulse width

1-10μS

Inlet water temperature

+25 to +35 ℃

Output precision

<±1%, Set value comparison

Influent flow

 l/min  >10
Techanical parameters
Arc energy （ARC) 0.5mJ/kW
DP communication interface DB-9 ProfiBus Pin 3A 8B 5GND(optional)
Duty cycle 10-90%
Input Voltage & Frequency 380-400Vac 3P +PE 50-60HZ
Output current 500V/30A
Output Power 18KW
Output voltage 0-1000V/15A
PLC control mode Local/Remote (Analog, RS485, DP)
RS485 communication interface DB-9 Modbus Pin 1A 2B 5GND
Working frequency 40-80KHZ