PEII Sine Wave Mid Frequency Sputter Power Supply
Product Code:
PEII sine wave intermediate frequency power supply series
Weight:
55.00kg
Dimensions:
160.00cm x 140.00cm x 80.00cm
★ Sine wave output, small harmonics; high ionization rate, good film quality;
★ It has excellent current and voltage arc suppression management system;
★ It has a wide load range, three-speed load matching adjustment, and a wide range of load adaptation;
★ Low energy storage, high product yield, no more than 0.5MJ/KW;
★ It has control modes such as power and current.
★ It has intermittent pulse power output function;
★ It is equipped with pure copper plate water cooling system; high power density;
★ It has perfect monitoring and protection functions such as current limiting, voltage limiting, overcurrent, overvoltage, arcing and short circuit.